Time-dependent deformation behavior of freestanding and SiNx-supported gold thin films investigated by bulge tests

Language
en
Document Type
Article
Issue Date
2016-12-21
Issue Year
2015
Authors
Merle, Benoit
Cassel, Detlev
Göken, Mathias
Editor
Abstract

A novel strain-rate jump method was developed for the plane-strain bulge test and used to investigate the time-dependent deformation behavior of gold thin films in the thickness range 100–400 nm. The experimental method is based on an abrupt variation of the pressurization rate. The evaluated strain-rate sensitivity was found to be five times higher for films in freestanding condition (m = 0.094) than for films tested on a SiNx substrate (m = 0.020). Bulge creep tests confirmed this increased time-dependence. The observation of the surface of the freestanding films after the creep tests provided evidence of apparent grain boundary sliding taking place next to intragranular plastic deformation. The out-of-plane deformation was presumably favored by the columnar microstructure of the samples, with grains extending between both free surfaces. In the case of SiNx-supported films, grain boundary sliding was prevented by the good adhesion of gold to the SiNx substrate.

Journal Title
Journal of Materials Research
Volume
30
Issue
14
Citation
Journal of Materials Research 30.14 (2015): S. 2161-2169. <https://doi.org/10.1557/jmr.2015.184>
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